铝互连线的电迁移问题及超深亚微米技术下的挑战

铝互连线的电迁移问题历来是微电子产业的研究热点，其面临的电迁移可靠性挑战也是芯片制造业最持久和最重要的挑战之一.从20世纪90年代开始，超深亚微米(特征尺寸≤0.18 μm)铝互连技术面临了更加复杂的电迁移可靠性问题.从电迁移理论出发，分析概括了铝互连电迁移问题的研究方法，总结了上世纪至今关于铝互连电迁移问题的主要经验；最后结合已知的结论和目前芯片制造业现状，分析了当前超深亚微米铝互连线电迁移可靠性挑战的原因和表现形式，提出了解决这些问题的总方向. 关键词： 电迁移 铝互连 微结构     

SN方法粒子输运计算程序自动建模关键技术问题研究

在充分调研和分析SN方法粒子输运计算程序自动建模方法的基础上，对建模过程中的模型文件格式识别、属性编辑、空腔处理及自动划分离散网格等关键技术问题进行了研究，并提出了合理可行的解决方法。通过对SNAM程序建模部分功能测试，验证了这些方法的正确性和有效性。This paper presents two approaches to enhance the geometry modeling ability of SN particle transport simulation codes and focus on the key issues that lie in the processing from CAD model to SN code geometry model, e.g. CAD file format support, void modeling, mesh generation and model-editing. SNAM （SN Automatic Modeling system） has been developed as an interface code between commercial CAD software and SN particle transport simmulation codes. The testing results have shown that the algorithm and implementation used in SNAM are efficient and capable of all the necessary processing from CAD model to SN geometry model.     

The operational performance of the Yale ESTU

The ESTU began operation in 1988 and achieved the design voltage of 20 MV in 1990. Since that time, improvements to the gas handling system, negative ion injector, accelerator terminal and control system have greatly increased its capability and reliability. Today, the ESTU can efficiently produce an extensive assortment of stable ions at wide-ranging energies in support of low-energy nuclear physics.     

Application of pressure sensitive paint measurement to a low-solidity cascade diffuser of a transonic centrifugal compressor

A pressure sensitive paint (PSP) measurement has been known as a pressure field measurement technique based on the oxygen quenching phenomenon of luminescence of specific luminophores. A PSP measurement was applied for pressure field measurement in a low-solidity circular cascade diffuser of a single-stage transonic centrifugal compressor with 5 in pressure ratio for HFC134a gas. The oxygen concentration was about 500 ppm. Ru (bath-phen) was adsorbed on a silica-gel thinlayer chromatography sheet, and the sheet was pasted onto the side-wall between the cascade vanes. A drastic change in luminescent intensity was recognized during a surge condition. Also the pressure variations based on luminescent intensity agreed well with the pressure fluctuations measured using a semiconductor pressure sensor with high-frequency-response. It was shown that a PSP measurement worked well to investigate the unsteady pressure fields in a circular cascade diffuser of a transonic centrifugal compressor. Moreover, the time response of PSP becomes clear as a problem to be overcome for the present.     

On bent functions with some symmetric properties

This paper discusses a kind of bent functions that have some symmetric properties about some variables. Section 2 mainly discusses the bent functions symmetric about some two variables and gives the necessary and sufficient condition for these functions. Section 3 gives algebraic expressions of some bent functions.     

2,7-二氯荧光素与蛋白质相互作用的分光光度法研究

首次采用分光光度法研究了模拟生理条件(pH 7.4 Tris-HCl缓冲溶液,离子强度I=0.1)下2,7-二氯荧光素与牛血清白蛋白(BSA)相互作用的情况.研究结果表明:两者相互作用形成稳定的复合物,最大吸收波长为509nm,与2,7-二氯荧光素的最大吸收波长502nm比较,红移了7nm;两者之间主要通过静电引力结合,但并不排除疏水作用力和氢键;两者之间的结合数为32.     

工作气压对电子束沉积ZrO2薄膜折射率和聚集密度的影响

采用电子束蒸发的方法，用石英晶体振荡法监控薄膜的蒸发速率，在不同工作气压下制备了ZrO2薄膜样品.在相调制型椭圆偏振光谱仪和分光光度计上对样品的光谱特性进行了测试.根据波长漂移的理论，计算出薄膜的聚集密度.结果表明，随着工作气压的降低，薄膜的聚集密度和折射率都随之增大.     

双向分束角对称的偏光分束镜设计与性能分析

为了获得分束角对称的偏光分束棱镜，在双Wollaston棱镜结构的基础上，通过合理设计棱镜左右两端晶体光轴的取向，使棱镜整体呈中心切面对称；在保证对正向入射的光对称分束的同时，对反向入射光同样可以对称分束，达到了双向对称分束的目的；在此基础上给出了晶体光轴的旋转角δ与棱镜结构角S以及与波长的关系；并分析了对633 nm设计的棱镜用于其他波长时分束角的对称性.结果表明：在±300 nm的光谱范围内，分束角的不对称度均小于0.24°.     

8β-hydroxyeremophil-7(11)-ene-12,8α(4β,6α)-diolide分子的晶体结构

运用层析法、结晶法从狭苞橐吾全草中分离得到艾里莫芬烷型倍半萜8β-hydroxyeremophil-7(11)-ene-12,8α(4β,6α)-diolide化合物,并通过质谱、核磁共振氢谱和碳谱、氢核-氢核相关谱、异核多量子相干谱和异核多键相干谱进行结构鉴定．其单晶经X射线衍射测试表明,其晶体属正交晶系,空间群为P212121,晶胞参数为: a=6．8519(5),b=10．7191(8),c=18．5942(14)A,V=1365．67(18) A3,Z=4,Dc=1．354 mg／m3．F(000)=592,μ=0．101 mm-1     

DUAL FUNCTIONALS OF SAID-BEZIER TYPE GENERALIZED BALL BASES OVER TRIANGLE DOMAIN AND THEIR APPLICATION

A family of Said-Bézier type generalized Ball (SBGB) bases and surfaces with a parameter H over triangular domain is introduced, which unifies Bézier surface and Said-Ball surface and includes several intermediate surfaces. To convert different bases and surfaces, the dual functionals of bases are presented. As an application of dual functionals, the subdivision formulas for surfaces are established.